To ensure that our products are clean room compatible we have carried out particle generation tests. The tests where conducted in a clean room, class: 100 environment. Test jackets where removed from the initial installation point and during this routine exposed to a laser counter (Lasair no: 310 smallest particle size 0,3 µm).

Test objects 
Three different types and brands of heating jackets where tested:
  • Hemi Heating jacket, used for 2 years heating a gas line to a Nitride furnace.
  • Glass fibre heating jacket, used for 3 years in a Nitride furnace heating pump line.
  • Silicone embedded heating jacket, used for 2 years in a TEOS furnace heating the main vacuum valve.
Conclusion 
The test data is present in above bar graph. The result clearly demonstrates that our product is the “cleanest” choice and the most suitable for clean room installations.